J. Schmidt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Schmidt returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1On the equilibrium concentration of boron-oxygen defects in crystalline silicon
2Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3


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