Chuanzhen Zhou Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chuanzhen Zhou returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
2TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
3The effects of layering in ferroelectric Si-doped HfO2 thin films