Kechao Tang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kechao Tang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Nitride passivation of the interface between high-k dielectrics and SiGe
2The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces


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