Kechao Tang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kechao Tang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces |
2 | Nitride passivation of the interface between high-k dielectrics and SiGe |