Kechao Tang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kechao Tang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Nitride passivation of the interface between high-k dielectrics and SiGe|
|2||The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces|