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The publication database currently has 1536 entries.
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189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics
82 Theses

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Recent Database Additions
Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
Search 1536 plasma ALD publications by:
189 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
239 Film and Plasma Characteristics

Chris Hodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chris Hodson returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
2Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
3Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
4Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
5Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
6Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD

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