Chris Hodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chris Hodson returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
2Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
3Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
4Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
5Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
6Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD


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