November 2022 Stats

The publication database currently has 1655 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5090 Authors

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2021 Year in Review

Recent Database Additions

Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films

Chris Hodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chris Hodson returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
2	Deposition of TiN and HfO₂ in a commercial 200 mm remote plasma atomic layer deposition reactor
3	Innovative remote plasma source for atomic layer deposition for GaN devices
4	Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
5	Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
6	Preliminary investigation of high-k materials - TiO₂ doped Ta₂O₅ films by remote plasma ALD
7	Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD