Chris Hodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chris Hodson returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
2Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
3Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
4Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
5A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
6Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
7Innovative remote plasma source for atomic layer deposition for GaN devices
8Plasma and Thermal ALD of Al2O3 in a Commercial 200mm ALD Reactor