Miia Mäntymäki Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Miia Mäntymäki returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films