Your search for plasma enhanced atomic layer deposition publications authored by Detlef Theirich returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier|
|2||Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition|
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