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Detlef Theirich Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Detlef Theirich returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
2Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition

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