Laurent Dussault Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Laurent Dussault returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Interface and plasma damage analysis of PEALD TaCN deposited on HfO2 for advanced CMOS studied by angle resolved XPS and C-V
2Evaluation of plasma parameters on PEALD deposited TaCN