Yuqing Xiong Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yuqing Xiong returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides|
|2||Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films|