Lauri Kilpi Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Lauri Kilpi returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors|
|2||Tribological properties of thin films made by atomic layer deposition sliding against silicon|