S. N. Polyakov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. N. Polyakov returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks


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