Shigeru Imai Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Shigeru Imai returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic hydrogen-assisted ALE of germanium|
|2||Atomic layer epitaxy of Si using atomic H|
|3||Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon|