Shigeru Imai Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shigeru Imai returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
2Atomic layer epitaxy of Si using atomic H
3Atomic hydrogen-assisted ALE of germanium