Martin E. Pemble Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martin E. Pemble returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
2Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
3Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
4Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
5High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
6Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
7Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
8Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition