Martin E. Pemble Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Martin E. Pemble returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
2Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
3Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
4Growth of V2O5 Films for Battery Applications by Pulsed Chemical Vapor Deposition
5Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
6Influence of Substrate on Hafnium Silicate Metal-Insulator-Metal Capacitors Grown by Atomic Layer Deposition
7Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
8Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition