Xiao-Ying Zhang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xiao-Ying Zhang returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
2Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
3Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
4Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD