Suvi Haukka Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Suvi Haukka returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma|
|2||Film Uniformity in Atomic Layer Deposition|