Heidemarie Schmidt Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Heidemarie Schmidt returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices |
| 2 | Nanowire single-photon detectors made of atomic layer-deposited niobium nitride |