Joseph Aubuchon Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Joseph Aubuchon returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications |
| 2 | Plasma Enhanced Atomic Layer Deposition of TaN Films for Advanced Interconnects |