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  • Plasma-Enhanced Atomic Layer Deposition
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Thomas Riedl Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas Riedl returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
2Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier