Heungsoo Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Heungsoo Park returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-enhanced atomic layer deposition of low temperature silicon dioxide films using di-isopropylaminosilane as a precursor
2Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
3Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method