Jaclyn K. Sprenger Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jaclyn K. Sprenger returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electron-enhanced atomic layer deposition of silicon thin films at room temperature|
|2||Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions|