Jari Malm Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jari Malm returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Tribological properties of thin films made by atomic layer deposition sliding against silicon |
| 2 | Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition |