K.-B. Chung Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by K.-B. Chung returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Thermodynamic properties and interfacial layer characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition|