Marianna Kemell Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marianna Kemell returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films