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An economical, compact inductively coupled plasma source.

Ideal for:

  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Marianna Kemell Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marianna Kemell returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor