Kazunori Kurishima Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kazunori Kurishima returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor
2Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
3Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors