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Ji-Yu Feng Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Ji-Yu Feng returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Tuning size and coverage of Pd nanoparticles using atomic layer deposition |
| 2 | Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature |