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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Ji-Yu Feng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ji-Yu Feng returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
2Tuning size and coverage of Pd nanoparticles using atomic layer deposition
3Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature