Ji-Yu Feng Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ji-Yu Feng returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Tuning size and coverage of Pd nanoparticles using atomic layer deposition
2Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature