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Qanit Takmeel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qanit Takmeel returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The effects of layering in ferroelectric Si-doped HfO2 thin films
2Annealing behavior of ferroelectric Si-doped HfO2 thin films
3Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
4TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films