Saravana Balaji Basuvalingam Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Saravana Balaji Basuvalingam returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films