Your search for plasma enhanced atomic layer deposition publications authored by Lingyan Shen returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3|
|2||Low-temperature plasma-enhanced atomic layer deposition of HfO2/Al2O3 nanolaminate structure on Si|
|3||Negative differential resistance in the I-V curves of Al2O3/AlGaN/GaN MIS structures|
|4||Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition|
|5||Semiconductor-like nanofilms assembled with AlN and TiN laminations for nearly ideal graphene-based heterojunction devices|
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