Your search for plasma enhanced atomic layer deposition publications authored by R. L. Van Meirhaeghe returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of titanium nitride from TDMAT precursor|
|2||Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide|
|3||Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition|
|4||Ru thin film grown on TaN by plasma enhanced atomic layer deposition|
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