2022 Year in Review

August 2023 Stats


The publication database currently has 1695 entries.
210 Films
283 Precursors
78 Dep Hardware Sets
255 Characteristics
95 Theses
5203 Authors

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2021 Year in Review
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Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films Gallium nitride thin films by microwave plasma-assisted ALD Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium

Ronald L. Van Meirhaeghe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ronald L. Van Meirhaeghe returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
2Texture of atomic layer deposited ruthenium
3Ru thin film grown on TaN by plasma enhanced atomic layer deposition
4Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
5TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
6Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
7Atomic layer deposition of titanium nitride from TDMAT precursor
8Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide

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