Kris Driesen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Kris Driesen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects|
|2||Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor|