Timo Sajavaara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timo Sajavaara returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
2	Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
3	Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
4	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
5	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6	Properties of AlN grown by plasma enhanced atomic layer deposition
7	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
8	Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
9	Tribological properties of thin films made by atomic layer deposition sliding against silicon

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