Timo Sajavaara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timo Sajavaara returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
2	Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
3	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
4	Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
5	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
6	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
7	Properties of AlN grown by plasma enhanced atomic layer deposition
8	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
9	Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
10	Tribological properties of thin films made by atomic layer deposition sliding against silicon

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