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Timo Sajavaara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timo Sajavaara returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
2Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
3Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
4Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
5Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6Properties of AlN grown by plasma enhanced atomic layer deposition
7Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
8Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
9Tribological properties of thin films made by atomic layer deposition sliding against silicon


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