Sami Franssila Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sami Franssila returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support|
|2||Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma|