Virginia D. Wheeler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Virginia D. Wheeler returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
2Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
3Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
4The role of plasma in plasma-enhanced atomic layer deposition of crystalline films