Shihyun Ahn Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Shihyun Ahn returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices|
|2||High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors|