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An economical, compact inductively coupled plasma source.

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  • Plasma-Enhanced Atomic Layer Deposition
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Shihyun Ahn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shihyun Ahn returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
2High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors