Shihyun Ahn Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Shihyun Ahn returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices |
2 | High breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors |