Your search for plasma enhanced atomic layer deposition publications authored by Béla Pécz returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell|
|2||Index matching at the nanoscale: light scattering by core-shell Si/SiOx nanowires|
|3||Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition|
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