Kangsik Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kangsik Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Very high frequency plasma reactant for atomic layer deposition
2Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
3In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides