Geun Young Yeom Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Geun Young Yeom returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
2Very high frequency plasma reactant for atomic layer deposition