Hyoung-Sang Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyoung-Sang Park returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
2Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN
3Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
4PEALD of a Ruthenium Adhesion Layer for Copper Interconnects