Hyoung-Sang Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyoung-Sang Park returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN
2Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
3Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
4PEALD of a Ruthenium Adhesion Layer for Copper Interconnects