Hyun-Yong Yu Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hyun-Yong Yu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing|
|2||Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions|