Harri Lipsanen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Harri Lipsanen returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
2	Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
3	Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement
4	Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
5	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
6	GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
7	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
8	Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
9	Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
10	Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
11	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
12	Properties of AlN grown by plasma enhanced atomic layer deposition
13	Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
14	Surface passivation of GaAs nanowires by the atomic layer deposition of AlN
15	Tribological properties of thin films made by atomic layer deposition sliding against silicon

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