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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Anuradha Bulusu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anuradha Bulusu returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers
2The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
3Efficient Modification of Metal Oxide Surfaces with Phosphonic Acids by Spray Coating