Lu Liu Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Lu Liu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation|
|2||Comparison of passivation layers for AlGaN/GaN high electron mobility transistors|