Steven Marcus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Steven Marcus returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
2Film Uniformity in Atomic Layer Deposition
3Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
4TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD