Simo-Pekka Hannula Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simo-Pekka Hannula returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tribological properties of thin films made by atomic layer deposition sliding against silicon
2Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors