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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Zheng-tang Liu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zheng-tang Liu returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Layer-controlled and atomically thin WS2 films prepared by sulfurization of atomic-layer-deposited WO3 films
2Optical and electrical properties of Al:WS2 films prepared by atomic layer deposition and vulcanization