E. Pargon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. Pargon returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration
2Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach