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The publication database currently has 1657 entries.
204 Films
274 Precursors
78 Dep Hardware Sets
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Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition

Tsuyoshi Moriya Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tsuyoshi Moriya returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
3Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors
4Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition

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