Uwe Schroeder Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Uwe Schroeder returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Breakdown and Protection of ALD Moisture Barrier Thin Films|
|2||Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma|
|3||Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films|