Uwe Schroeder Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Uwe Schroeder returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Breakdown and Protection of ALD Moisture Barrier Thin Films
|Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
|Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma