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Klaus Hempel Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Klaus Hempel returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration |
| 2 | Challenges in spacer process development for leading-edge high-k metal gate technology |