Munehito Kagaya Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Munehito Kagaya returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors
3Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
4Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes