Massimo Tallarida Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Massimo Tallarida returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
2Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
3Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C